JPH048441U - - Google Patents
Info
- Publication number
- JPH048441U JPH048441U JP4896490U JP4896490U JPH048441U JP H048441 U JPH048441 U JP H048441U JP 4896490 U JP4896490 U JP 4896490U JP 4896490 U JP4896490 U JP 4896490U JP H048441 U JPH048441 U JP H048441U
- Authority
- JP
- Japan
- Prior art keywords
- gripping
- wafer cassette
- plate
- front plate
- gripping plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4896490U JPH048441U (en]) | 1990-05-09 | 1990-05-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4896490U JPH048441U (en]) | 1990-05-09 | 1990-05-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH048441U true JPH048441U (en]) | 1992-01-27 |
Family
ID=31566246
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4896490U Pending JPH048441U (en]) | 1990-05-09 | 1990-05-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH048441U (en]) |
-
1990
- 1990-05-09 JP JP4896490U patent/JPH048441U/ja active Pending